PLS960 Series
Sensaras, LLC
PLS 960 Series Multi-Point level monitoring.
The Ultrasonic Point Level System 960 Series is designed to detect the level of Ultra-Pure Liquid Chemical in Bubblers and Ampoules in the Semiconductor industry in PVD, CVD and ALD processes. The probe fits in the ½” or ¾” VCR fill port of the ampoules. There are no moving parts to the probe that may introduce impurities. It is not dependent on the color, dielectric, density and viscosity of the chemical. The design allows for multiple sensing points. All wetted parts of the probe is 316LSS, electro-polish finish and leak tested. Each probe is custom made to user’s specifications and requirements. The electronics are remotely mounted from the probes to allow for higher temperature applications. There is no calibration or adjustments between sensors.
Standard Features:
• The sensors can be made to any length.
• The sensor can be fitted with a K-Type thermocouple sensor.
• The set points can be places as close as 0.1” (2.5mm) apart.
• Lowest sensing as close as 0.3”(7.6mm) from the bottom of the canister, 0.2” (5mm) from the end of the sensor.
• Up to 7 point on 3/4VCR, and up to 5 point on ½” VCR.
• Up to 120°C standard, up to 180°C special Hi-Temp.
• The electronics output has a LED and a 1A SPDT relay for each point.
• In addition, it has a 1A SPDT Fault Function relay.
• An option of electronics with fail-safe relay contacts.
• An option of electronics with fail-safe with a Watch-Dog-Timer-Circuit.
• An option of electronics with standard and fail-safe and TC display.
Benefits-
• With Ultrasonic Technology there are no moving parts.
• Color, viscosity, dielectric constant and density do not affect the performance of the system.
As each system is customized for the canister the sensor is used in, the design of the sensor has a part number.
Please call the factory with the application. A drawing for the sensor will be made for your application.
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